Cite
HARVARD Citation
Hossain, M. et al. (2016). High-density radio-frequency magnetized plasma sputtering source with rotational square-shaped arrangement of rod magnets for uniform target utilization. Vacuum. pp. 219-225. [Online].
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Hossain, M. et al. (2016). High-density radio-frequency magnetized plasma sputtering source with rotational square-shaped arrangement of rod magnets for uniform target utilization. Vacuum. pp. 219-225. [Online].