A — Z der Dünnschichttechnologie (Gasphasen‐Verfahren). (April 2016)

Record Type:: Journal Article
Title:: A — Z der Dünnschichttechnologie (Gasphasen‐Verfahren). (April 2016)
Main Title:: A — Z der Dünnschichttechnologie (Gasphasen‐Verfahren)
Other Names:: Schultrich Bernd sponsoringEditor.
Abstract:
Is Part Of:: Vakuum in Forschung und Praxis. Volume 28:Number 2(2016)
Journal:: Vakuum in Forschung und Praxis
Issue:: Volume 28:Number 2(2016)
Issue Display:: Volume 28, Issue 2 (2016)
Year:: 2016
Volume:: 28
Issue:: 2
Issue Sort Value:: 2016-0028-0002-0000
Page Start:: 62
Page End:: 73
Publication Date:: 2016-04
Subjects:: Vacuum technology -- Periodicals
621.55
Journal URLs:: http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1522-2454 ↗
http://onlinelibrary.wiley.com/ ↗
DOI:: 10.1002/vipr.201690015 ↗
Languages:: English
ISSNs:: 0947-076X
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - 9140.880000
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 2392.xml