An improved preparation method for cross‐sectional TEM specimens of films deposited on metallic substrates. Issue 4 (25th January 2016)

• Record Type: Journal Article
• Authors: Ma, Bingyang; Shi, Kaicheng; Shang, Hailong; Zhang, Anming; Li, Rongbin; Li, Geyang
• Is Part Of: Microscopy research and technique. Volume 79:Issue 4(2016:Apr.)
• Page Start: 276
• Page End: 279
• Publication Date: 2016-01-25
• Subjects: thin film -- TEM -- cross‐sectional specimen -- specimen preparation; Electron microscopy -- Technique -- Periodicals; Microscopy -- Periodicals; Microscopy -- Technique -- Periodicals; 502.825
• DOI: 10.1002/jemt.22627
• Languages: English
• ISSNs: 1059-910X

Abstract

ABSTRACT: Cross‐sectional TEM analysis is one of the most important techniques to characterize microstructures of films. However, the complex process, low efficiency, and low success rate of specimen preparation limit its application. This paper analyzed the main causes of low success rate and proposed an improved method for specimen preparation of films deposited on metallic substrates. This method consisting of twin‐jet electropolishing and one‐sided rocking ion milling is high in efficiency and success rate. Microsc. Res. Tech. 79:276–279, 2016 . © 2016 Wiley Periodicals, Inc.