Sliding mode control design for a rapid thermal processing system. (2nd April 2016)

• Record Type: Journal Article
• Authors: Xiao, Tengfei; Li, Han-Xiong
• Is Part Of: Chemical engineering science. Volume 143(2016)
• Page Start: 76
• Page End: 85
• Publication Date: 2016-04-02
• Subjects: Sliding mode control -- Rapid thermal processing -- Distributed parameter system -- Galerkin׳s method; Chemical engineering -- Periodicals; Génie chimique -- Périodiques; Chemical engineering; Periodicals; Electronic journals; 660
• DOI: 10.1016/j.ces.2015.12.021
• Languages: English
• ISSNs: 0009-2509

Abstract

Abstract: A sliding mode control strategy is developed for temperature control of a rapid thermal processing (RTP) system to enhance temperature accuracy and uniformity when heating in this work. Temperature dynamics of the RTP is nonlinear and infinite-dimensional while order of the controller should be finite due to implementation limitations. Developing a nonlinear low-order controller for the system is important if accurate and uniform control of the temperature is required. This work addresses this issue by developing a sliding mode controller based on the dominant modes of the system. The schemes are applied to a RTP system and excellent performances are achieved. Abstract : Highlights: For a RTP system, dominant mode based sliding mode controller is proposed. Temperature accuracy and uniformity when heating are enhanced. The dynamics of the dominant mode is derived by Galerkin׳s method. Quasi-sliding mode control is proposed to eliminate the chattering effect. The temperature is estimated through a limited number of sensors.