Displacement measurement system for inverters using computer micro-vision. (June 2016)

• Record Type: Journal Article
• Authors: Wu, Heng; Zhang, Xianmin; Gan, Jinqiang; Li, Hai; Ge, Peng
• Is Part Of: Optics and lasers in engineering. Volume 81(2016:)
• Page Start: 113
• Page End: 118
• Publication Date: 2016-06
• Subjects: Micro-vision -- Image processing -- Microscopy -- Displacement measurement; Lasers in engineering -- Periodicals; Optical measurements -- Periodicals; Optics -- Periodicals; Lasers en ingénierie -- Périodiques; Mesures optiques -- Périodiques; Optique -- Périodiques; 621.36605
• DOI: 10.1016/j.optlaseng.2015.12.018
• Languages: English
• ISSNs: 0143-8166

Abstract

Abstract: We propose a practical system for noncontact displacement measurement of inverters using computer micro-vision at the sub-micron scale. The measuring method of the proposed system is based on a fast template matching algorithm with an optical microscopy. A laser interferometer measurement (LIM) system is built up for comparison. Experimental results demonstrate that the proposed system can achieve the same performance as the LIM system but shows a higher operability and stability. The measuring accuracy is 0.283 μm. Highlights: A practical system for the displacement measurement of the inverters is proposed. The measuring method is based on a fast template matching algorithm. The system has a high operability and stability. The sub-micron scale measuring accuracy is achieved. The system can give a great help for the complaint mechanism design.