Preliminary Modelling and Implementation of the 2D-control for a Nanopositioning Long Range Stage. (2015)

• Record Type: Journal Article
• Authors: Torralba, M.; Albajez, J.A.; Yagüe, J.A.; Aguilar, J.A.
• Is Part Of: Procedia engineering. Volume 132(2015)
• Page Start: 824
• Page End: 831
• Publication Date: 2015
• Subjects: Linear motors -- nanopositioning -- control implementation -- long range -- 2D-stage; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2015.12.566
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: Different systems are recently developed to obtain effective positioning at nanometer scale with increased working ranges. For this purpose, a two-dimensional nanopositioning platform (NanoPla) has been design and manufactured. To assure the demanding metrological performance the drive and control system is being defined and validated. Based on four home-made linear motors as actuators, this work is focused on the study of the control-loop for 1D- and 2D-cases with the aim of the preliminary modelling and posterior implementation. The different required blocks are presented and an initial controller solution is proposed to achieve the established positioning requests.