Cite
HARVARD Citation
Chen, F. et al. (2015). Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges. Microelectronics and reliability. 55 (12), pp. 2727-2747. [Online].
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Chen, F. et al. (2015). Breakdown data generation and in-die deconvolution methodology to address BEOL and MOL dielectric breakdown challenges. Microelectronics and reliability. 55 (12), pp. 2727-2747. [Online].