Fabrication of a nano-scale pattern with various functional materials using electrohydrodynamic lithography and functionalization. Issue 7 (13th January 2016)

• Record Type: Journal Article
• Authors: Lee, Suok; Jung, Sang Hee; Kang, Dae Joon; Lee, JaeJong
• Is Part Of: RSC advances. Volume 6:Issue 7(2016)
• Page Start: 5944
• Page End: 5948
• Publication Date: 2016-01-13
• Subjects: Chemistry -- Periodicals; 540.5
• DOI: 10.1039/c5ra24493e
• Languages: English
• ISSNs: 2046-2069

Abstract

Abstract : Direct patterning with inorganic based materials has been developed using electrohydrodynamic lithography. Various sizes and morphologies of inorganic patterns were successfully replicated. Abstract : Direct patterning with inorganic based materials has been studied using many lithographic techniques. Among lithographic methods, electro-hydrodynamic lithography (EHL) is a good candidate to obtain a fine inorganic pattern. Being a minimal contact patterning technique, our method is simple, versatile and inexpensive, and has the potential to become a powerful tool for realizing inorganic based nanostructures on a wafer scale. Inorganic precursor resists are exploited here as relatively high-speed resists compared to macromolecule resists in an effort to reduce the patterning time significantly. These resists are developed to have functionalities via a thermal annealing process which can be used in versatile applications. An amorphous inorganic precursor pattern fabricated by EHL is transitioned to a crystalline phase via an annealing process. Herein, functional material patterns such as TiO2, VO2, Fe3 O4, and PZT are successfully fabricated and functionalized via EHL and the annealing process.