Thermally-induced phase transformation sequence of arc evaporated Ta–Al–N coatings. (1st March 2016)

• Record Type: Journal Article
• Authors: Koller, C.M.; Kirnbauer, A.; Rachbauer, R.; Kolozsvári, S.; Mayrhofer, P.H.
• Is Part Of: Scripta materialia. Volume 113(2016)
• Page Start: 75
• Page End: 78
• Publication Date: 2016-03-01
• Subjects: Cathodic arc evaporation -- Tantalum nitride -- Thermal stability; Materials -- Periodicals; Metallurgy -- Periodicals; Metalen; Legeringen; Materiaalkunde; Metals, metalworking and machinery industries; Metals; Electronic journals; 620.11
• DOI: 10.1016/j.scriptamat.2015.09.040
• Languages: English
• ISSNs: 1359-6462

Abstract

Abstract: Differential scanning calorimetry and thermogravimetric analyses combined with XRD and TEM investigations demonstrate that single-phase face-centred cubic Ta0.89 Al0.11 N1.2 coatings decompose into wurtzite AlN and hexagonal Ta2 N phases upon vacuum annealing to 1500 °C. The Ta2 N phase transformation proceeds via hexagonal Ta5 N6 at ~ 1000 °C and hexagonal ε-TaN at ~ 1100 °C. A significant N2 -loss between 1300 °C and 1500 °C, without a structural change of the Ta2 N phase, suggests the formation of TaN0.3 —at the Ta-rich Ta2 N phase field. Graphical abstract: