A Comparative Analysis of a Si/SiGe Heterojunction-Bipolar Transistors: APT, STEM-EDX and ToF-SIMS. (23rd September 2015) - Estivill, Robert; Chevalier, Pascal; Lorut, Frederic; Juhel, Marc; Clement, Laurent; Servanton, Germain; Avenier, Gregory; Grenier, Adeline; Blavette, Didier