Cite
HARVARD Citation
Zhou, L. et al. (2015). Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides. Journal of materials research. 30 (19), pp. 2928-2933. [Online].
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Zhou, L. et al. (2015). Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides. Journal of materials research. 30 (19), pp. 2928-2933. [Online].