Theory and New Applications of Ex Situ Lift Out. (16th July 2015)

• Record Type: Journal Article
• Authors: Giannuzzi, Lucille A.; Yu, Zhiyang; Yin, Denise; Harmer, Martin P.; Xu, Qiang; Smith, Noel S.; Chan, Lisa; Hiller, Jon; Hess, Dustin; Clark, Trevor
• Is Part Of: Microscopy and microanalysis. Volume 21:Number 4(2015:Aug.)
• Page Start: 1034
• Page End: 1048
• Publication Date: 2015-07-16
• Subjects: ex situ lift out, -- FIB, -- TEM, -- specimen preparation, -- Pick&Place; Microscopy -- Periodicals; Microchemistry -- Periodicals; 502.82
• DOI: 10.1017/S1431927615013720
• Languages: English
• ISSNs: 1431-9276

Abstract

Abstract: The ex situ lift out (EXLO) adhesion forces are reviewed and new applications of EXLO for focused ion beam (FIB)-prepared specimens are described. EXLO is used to manipulate electron transparent specimens on microelectromechanical systems carrier devices designed for in situ electron microscope analysis. A new patented grid design without a support film is described for EXLO. This new slotted grid design provides a surface for holding the specimen in place and also allows for post lift out processing. Specimens may be easily manipulated into a backside orientation to reduce FIB curtaining artifacts with this slotted grid. Large EXLO specimens can be manipulated from Xe + plasma FIB prepared specimens. Finally, applications of EXLO and manipulation of FIB specimens using a vacuum probe lift out method are shown. The vacuum probe provides more control for placing specimens on the new slotted grids and also allows for easy manipulation into a backside configuration.