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HARVARD Citation
Zhu, P. et al. (n.d.). The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS. Materials research innovations. pp. S10-403-S10-407. [Online].
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Zhu, P. et al. (n.d.). The effect of diluent gases on the growth of β-SiC films by laser CVD with HMDS. Materials research innovations. pp. S10-403-S10-407. [Online].