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Tu, R. et al. (n.d.). Preparation of ultra-thick β-SiC films using different carbon sources. Materials research innovations. pp. S10-397-S10-402. [Online].
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Tu, R. et al. (n.d.). Preparation of ultra-thick β-SiC films using different carbon sources. Materials research innovations. pp. S10-397-S10-402. [Online].