Electrical and Optical Properties of Transparent Conducting p‐Type SrTiO3 Thin Films. Issue 1 (3rd October 2015)

• Record Type: Journal Article
• Authors: Huang, Wei; Nechache, Riad; Li, Shun; Chaker, Mohamed; Rosei, Federico
• Is Part Of: Journal of the American Ceramic Society. Volume 99:Issue 1(2016)
• Page Start: 226
• Page End: 233
• Publication Date: 2015-10-03
• Subjects: Ceramics -- Periodicals; 620.1405
• DOI: 10.1111/jace.13949
• Languages: English
• ISSNs: 0002-7820

Abstract

Abstract : We report a systematic study of the electrical and optical properties of epitaxial perovskite p‐ type In‐doped SrTiO3 thin films (SrIn x Ti1− x O3, 0 ≤ x ≤ 0.15) grown on single‐crystal (100)‐oriented LaAlO3 substrates using a hybrid method which combines pulsed laser deposition and molecular beam epitaxy in a range of deposition conditions. X‐ray diffraction analysis confirms the epitaxial growth of high crystal quality films. Four‐point probe and Hall Effect measurements demonstrate that the films are p‐ type semiconductors with a low resistivity of ~10 −2 Ω·cm and a high carrier concentration of ~10 19 cm −3 . The optical transmittance spectra reveal that the films are highly transparent (˃70%) in the visible region.