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HARVARD Citation
Herth, E. et al. (n.d.). Modeling and characterization of piezoelectric beams based on an aluminum nitride thin‐film layer. Physica status solidi. 213 (1), pp. 114-121. [Online].
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Herth, E. et al. (n.d.). Modeling and characterization of piezoelectric beams based on an aluminum nitride thin‐film layer. Physica status solidi. 213 (1), pp. 114-121. [Online].