Research on a Micro Piezoelectric Gyroscope with Concentrated Rocking‐Mass. (23rd March 2015)

• Record Type: Journal Article
• Authors: Cheng, Yuxiang; Zhang, Weiping; Tang, Jian; Liu, Wu; Wang, Yinghai; Chen, Wenyuan
• Is Part Of: International journal of applied ceramic technology. Volume 12:(2015)Supplement 3
• Page Start: E208
• Page End: E214
• Publication Date: 2015-03-23
• Subjects: Ceramics -- Periodicals; Ceramics -- Technological innovations -- Periodicals; 620.1405
• DOI: 10.1111/ijac.12397
• Languages: English
• ISSNs: 1546-542X

Abstract

Abstract : This study introduces a Micro Electro Mechanical Systems (MEMS) piezoelectric gyroscope with a concentrated rocking‐mass, made from PZT ceramic. The gyroscope operates in the rocking mode with a frequency of 91.3 kHz. This gyroscope follows the study of the MEMS piezoelectric BAW gyroscope with an improvement of fewer boundary constraints, which enhances the device's operability and characteristic. Through the MEMS fabrication process, the device with a side of length 12 mm achieves a rate sensitivity of 30.7 μV/°/s and a bias stability of 8.6°/s. This study describes the design, fabrication, circuit system, and characteristics of this micro piezoelectric gyroscope.