Local dynamic range compensation for scanning electron microscope imaging system. Issue 6 (13th May 2015)

• Record Type: Journal Article
• Authors: Sim, K.S.; Huang, Y.H.
• Is Part Of: Scanning. Volume 37:Issue 6(2015)
• Page Start: 381
• Page End: 388
• Publication Date: 2015-05-13
• Subjects: SEM images -- contrast enhancement -- local dynamic range enhancement; Scanning electron microscopy -- Periodicals; 502.825
• DOI: 10.1002/sca.21226
• Languages: English
• ISSNs: 0161-0457

Abstract

Summary: This is the extended project by introducing the modified dynamic range histogram modification (MDRHM) and is presented in this paper. This technique is used to enhance the scanning electron microscope (SEM) imaging system. By comparing with the conventional histogram modification compensators, this technique utilizes histogram profiling by extending the dynamic range of each tile of an image to the limit of 0–255 range while retains its histogram shape. The proposed technique yields better image compensation compared to conventional methods. SCANNING 37:381–388, 2015. © 2015 Wiley Periodicals, Inc.