Fabrication of Structurally Simple Index‐Matched ITO Films Using Roll‐to‐Roll Sputtering for Touch Screen Panel Devices. Issue 11 (28th August 2015)

• Record Type: Journal Article
• Authors: Kim, Cheol Hwan; Choi, Woo Jin; Cho, Seong Keun; Goshima, Daiji; Ham, Dong Seok; Kim, Kwang‐Je; Jeong, Jongkoo; Lee, Jae Heung; Lee, Sang‐Jin
• Is Part Of: Plasma processes and polymers. Volume 12:Issue 11 (2015)
• Page Start: 1322
• Page End: 1327
• Publication Date: 2015-08-28
• Subjects: film outgassing -- indium tin oxide -- optoelectronic devices -- roll‐to‐roll sputtering -- touch screen panel; Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201500057
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract : We report the electrical and optical properties of structurally simple refractive‐index‐matched indium tin oxide (IM‐ITO) films prepared on high‐refractive index hard‐coated polyethylene terephthalate (KM‐V2) substrates by using a pilot scale roll to roll magnetron sputtering system for implementation in touch screen panels. We found that the ITO thin films are polycrystalline with a preferred (222) orientation. We determined the appropriate conditions for the deposition of simple‐structure IM‐ITO films on KM‐V2 substrates for touch screen panels with an invisible electrode pattern. Moreover, the outgassing of the polymer substrate is very important in the roll‐to‐roll sputtering fabrication of high‐quality IM‐ITO films with the required electrical and optical properties. Abstract : This report presents the fabrication of structurally simple refractive‐index‐matched indium tin oxide (IM‐ITO) films by using a pilot scale roll‐to‐roll sputtering system for touch screen panels and outgassing effect of ITO films on polymer substrates. There are noticeable improvements both in reduction of manufacturing process and fabrication of high‐quality ITO films on polymer substrates.