Antireflection ln2O3 coatings of self‐organized TiO2 nanotube layers prepared by atomic layer deposition. Issue 9 (7th September 2015)

• Record Type: Journal Article
• Authors: Macak, Jan M.; Prikryl, Jan; Sopha, Hanna; Strizik, Lukas
• Is Part Of: Physica status solidi. Volume 9:Issue 9(2015:Sep.)
• Page Start: 516
• Page End: 520
• Publication Date: 2015-09-07
• Subjects: Solid state physics -- Periodicals; 530.4105
• DOI: 10.1002/pssr.201510245
• Languages: English
• ISSNs: 1862-6254

Abstract

<abstract abstract-type="main" id="pssr201510245-abs-0001"> <title> <x xml:space="preserve">Abstract</x> </title> <p>We report on the uniform anti‐reflection coating of TiO₂ nanotube layers with a secondary material – indium trioxide (In₂O₃) – by atomic layer deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nanotubes for three different tube layers with aspect ratio up to ≈80, which is so far the highest aspect ratio reported for ALD‐processed self‐organized anodic TiO₂ nanotubes. We show that uniform In₂O₃coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In₂O₃. (© 2015 WILEY‐VCH Verlag GmbH &amp;Co. KGaA, Weinheim)</p> </abstract>