Film Stress of Amorphous Hydrogenated Carbon on Biaxially Oriented Polyethylene Terephthalate. Issue 9 (2nd June 2015)

• Record Type: Journal Article
• Authors: Bahre, Hendrik; Behm, Henrik; Grochla, Dario; Böke, Marc; Dahlmann, Rainer; Hopmann, Christian; Ludwig, Alfred; Winter, Jörg; Fouquet, Thierry; Girard‐Lauriault, Pierre‐Luc
• Is Part Of: Plasma processes and polymers. Volume 12:Issue 9(2015:Sep.)
• Page Start: 896
• Page End: 904
• Publication Date: 2015-06-02
• Subjects: Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201500045
• Languages: English
• ISSNs: 1612-8850

Abstract

<abstract abstract-type="main" xml:lang="en"> <title> <x xml:space="preserve">Abstract</x> </title> <sec id="ppap201500045-sec-0001" sec-type="section"> <p>Amorphous hydrogenated carbon (a‐C:H) deposited on steel with plasma enhanced chemical vapor deposition can be used as elongation tolerant oxygen barrier. However, the elongation tolerance of the a‐C:H film is lost if deposited on a poly(ethylene terephthalate) (PET) for reasons unknown. To assess this phenomenon, a‐C:H was deposited on PET, silicon substrates, and silicon micro‐cantilevers, and the stress was determined by measuring the radius of curvature. a‐C:H deposited on PET showed lower compressive stress than on silicon. This difference is not due to the formation of a gradient layer or plastic deformation of PET. Instead, the most probable explanation is that energetic ions cause a partial release of biaxial orientation within the PET, thereby reducing the compressive stress.<inline-graphic xlink:href="ark:/27927/pgj2ntc6hxx" content-type="ppap201500045-gra-0001" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" /></p> </sec> </abstract>