Low‐Temperature Synthesis of Large‐Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma‐Enhanced Chemical Vapor Deposition. (10th August 2015) - Ahn, Chisung
Abstract By plasma‐enhanced chemical vapor deposition, a molybdenum disulfide (MoS2) thin film is synthesized directly on a wafer‐scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm2 V−1 s−1. Also, humidity is successfully detected with MoS2‐based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.