Evaluation of subsurface damage caused by ultra-precision turning in fabrication of CaF2 optical micro resonator. Issue 1 (2015)

• Record Type: Journal Article
• Authors: Kakinuma, Yasuhiro; Azami, Shunya; Tanabe, Takasumi
• Is Part Of: CIRP annals. Volume 64:Issue 1(2015)
• Page Start: 117
• Page End: 120
• Publication Date: 2015
• Subjects: Production engineering -- Research -- Periodicals; 670.5
• DOI: 10.1016/j.cirp.2015.04.076
• Languages: English
• ISSNs: 0007-8506

Abstract

<abstract abstract-type="author" id="abs0005"> <title id="sect0005">Abstract</title> <sec> <p id="spar0005">The optical micro-resonator, which stores light at a certain spot, is essential in next-generation optical signal processing. Single-crystal calcium fluoride (CaF₂) is the most suitable material for this element. Ultra-precision turning is a feasible fabrication process for CaF₂ optical micro-resonators. In this study, the influence of subsurface damage on the resonator's <italic>Q</italic> factor is investigated. TEM observation shows that the subsurface layer of up to several tens of nanometers thickness changed from single-crystal to polycrystalline morphology due to ultra-precision turning. A diamond tool with 0° rake angle results in lower damage than one with negative rake angle, which enhances the resonator's performance.</p> </sec> </abstract>