Cite
HARVARD Citation
Zhang, Z. et al. (2015). Changes in surface layer of silicon wafers from diamond scratching. CIRP annals. 64 (1), pp. 349-352. [Online].
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Zhang, Z. et al. (2015). Changes in surface layer of silicon wafers from diamond scratching. CIRP annals. 64 (1), pp. 349-352. [Online].