Effects of Bragg reflector annealing on performance factors of FBAR‐based ultramass‐sensitive sensors. Issue 9 (September 2015)

• Record Type: Journal Article
• Authors: Yim, Munhyuk; Lee, Eunju; Kim, Yeongseon; Yoon, Giwan
• Is Part Of: Microwave and optical technology letters. Volume 57:Issue 9(2015:Sep.)
• Page Start: 2134
• Page End: 2137
• Publication Date: 2015-09
• Subjects: Microwaves -- Periodicals; Optics -- Periodicals; 621
• DOI: 10.1002/mop.29282
• Languages: English
• ISSNs: 0895-2477

Abstract

<abstract abstract-type="main"> <title>ABSTRACT</title> <p>We present the film bulk acoustic wave resonator‐based ultramass‐sensitive (FBAR‐UMS) sensors in which their resonance characteristic improvements, mainly due to Bragg reflector (BR) annealing, favorably influence their performance factors. We fabricated two kinds of FBAR‐UMS sensors, respectively, with nonannealed and annealed BRs (namely, nonannealed and annealed sensors) and investigated the effects of BR annealing on their performance factors by comparing their resonance frequency shift (−Δf_r), measured before and after each mass loading (Δm). As a result, the annealed sensors showed much larger mass‐loading effect and detectable mass range than the nonannealed ones. © 2015 Wiley Periodicals, Inc. Microwave Opt Technol Lett 57:2134–2137, 2015</p> </abstract>