Cite
HARVARD Citation
Zeng, J. et al. (n.d.). An equation-based nonlinear model for non-flat MEMS fixed–fixed beams with non-vertical anchoring supports. Journal of micromechanics and microengineering. pp. 1868-1880. [Online].
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Zeng, J. et al. (n.d.). An equation-based nonlinear model for non-flat MEMS fixed–fixed beams with non-vertical anchoring supports. Journal of micromechanics and microengineering. pp. 1868-1880. [Online].