Switched capacitor charge pump used for low‐distortion imaging in atomic force microscope. Issue 3 (9th March 2015)

• Record Type: Journal Article
• Authors: Zhang, Jie; Zhang, Lian Sheng; Feng, Zhi Hua
• Is Part Of: Scanning. Volume 37:Issue 3(2015)
• Page Start: 232
• Page End: 236
• Publication Date: 2015-03-09
• Subjects: Scanning electron microscopy -- Periodicals; 502.825
• DOI: 10.1002/sca.21203
• Languages: English
• ISSNs: 0161-0457

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Summary</title> <sec id="sca21203-sec-0001" sec-type="section"> <p>The switched capacitor charge pump (SCCP) is an effective method of linearizing charges on piezoelectric actuators and therefore constitute a significant approach to nano‐positioning. In this work, it was for the first time implemented in an atomic force microscope for low‐distortion imaging. Experimental results showed that the image quality was improved evidently under the SCCP drive compared with that under traditional linear voltage drive. SCANNING 37:232–236, 2015. © 2015 Wiley Periodicals, Inc.</p> </sec> </abstract>