ChemInform Abstract: Influence of the Oxygen Content in Obtaining Tunable and Strong Photoluminescence from Low‐Temperature Grown Silicon Oxycarbide Films. Issue 23 (June 2015)

Record Type:
Journal Article
Title:
ChemInform Abstract: Influence of the Oxygen Content in Obtaining Tunable and Strong Photoluminescence from Low‐Temperature Grown Silicon Oxycarbide Films. Issue 23 (June 2015)
Main Title:
ChemInform Abstract: Influence of the Oxygen Content in Obtaining Tunable and Strong Photoluminescence from Low‐Temperature Grown Silicon Oxycarbide Films.
Authors:
Lin, Zhenxu
Guo, Yanqing
Song, Chao
Song, Jie
Wang, Xiang
Zhang, Yi
Huang, Rui
Huang, Xintang
Abstract:
<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Amorphous SiC<sub>x</sub>O<sub>y</sub> films are prepared by very high frequency plasma enhanced chemical vapor deposition at 150 °C using a gas mixture of SiH<sub>4</sub>, CH<sub>4</sub>, and O<sub>2</sub> as the precursor.</p> </abstract>
Is Part Of:
ChemInform. Volume 46:Issue 23(2015)
Journal:
ChemInform
Issue:
Volume 46:Issue 23(2015)
Issue Display:
Volume 46, Issue 23 (2015)
Year:
2015
Volume:
46
Issue:
23
Issue Sort Value:
2015-0046-0023-0000
Page Start:
no
Page End:
no
Publication Date:
2015-06
Subjects:
Chemistry -- Abstracts -- Periodicals
540.5
Journal URLs:
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1522-2667 ↗
http://onlinelibrary.wiley.com/ ↗
DOI:
10.1002/chin.201523004 ↗
Languages:
English
ISSNs:
0931-7597
Deposit Type:
Legaldeposit
View Content:
Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:
British Library DSC - 3158.195000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store
Ingest File:
3260.xml