Enhanced Quantification for 3D Energy Dispersive Spectrometry: Going Beyond the Limitation of Large Volume of X-Ray Emission. (24th June 2014)

• Record Type: Journal Article
• Authors: Burdet, Pierre; Hébert, Cécile; Cantoni, Marco
• Is Part Of: Microscopy and microanalysis. Volume 20:Number 5(2014:Oct.)
• Page Start: 1544
• Page End: 1555
• Publication Date: 2014-06-24
• Subjects: Microscopy -- Periodicals; Microchemistry -- Periodicals; 502.82
• DOI: 10.1017/S1431927614001688
• Languages: English
• ISSNs: 1431-9276

Abstract

<abstract abstract-type="normal"> <title>Abstract</title> <p>This paper presents a method developed to quantify three-dimensional energy dispersive spectrometry (3D EDS) data with voxel size smaller than the volume from which X-rays are emitted. The influence of the neighboring voxels is corrected by applying recursively a complex quantification, improving thereby the accuracy of the quantification of critically small features. The enhanced quantification method is applied to simulated and measured data. A systematic improvement is obtained compared with classical quantification, proving the concept and the prospect of this method.</p> </abstract>