TiO2-based MIM capacitors featuring suppressed leakage current by embedding Ge nanocrystals. Issue 18 (5th March 2015)
- Record Type:
- Journal Article
- Title:
- TiO2-based MIM capacitors featuring suppressed leakage current by embedding Ge nanocrystals. Issue 18 (5th March 2015)
- Main Title:
- TiO2-based MIM capacitors featuring suppressed leakage current by embedding Ge nanocrystals
- Authors:
- Yu, Meng-Ting
Chen, Kuen-Yi
Chen, Yu-Hsun
Lin, Chia-Chun
Wu, Yung-Hsien - Abstract:
- <abstract abstract-type="toc"> <title> <x xml:space="preserve">Abstract</x> </title> <p> <graphic position="anchor" id="ga" xlink:href="ark:/27927/pgh3xs5b6j3" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" />Leakage current suppression of TiO<sub>2</sub>-based MIM capacitors is achieved by using plasma treatment and embedding Ge nanocrystals.</p> </abstract>
- Is Part Of:
- RSC advances. Volume 5:Issue 18(2015)
- Journal:
- RSC advances
- Issue:
- Volume 5:Issue 18(2015)
- Issue Display:
- Volume 5, Issue 18 (2015)
- Year:
- 2015
- Volume:
- 5
- Issue:
- 18
- Issue Sort Value:
- 2015-0005-0018-0000
- Page Start:
- 13550
- Page End:
- 13554
- Publication Date:
- 2015-03-05
- Subjects:
- Chemistry -- Periodicals
540.5 - Journal URLs:
- http://pubs.rsc.org/en/Journals/JournalIssues/RA ↗
http://www.rsc.org/ ↗ - DOI:
- 10.1039/c4ra15082a ↗
- Languages:
- English
- ISSNs:
- 2046-2069
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8036.750300
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 4173.xml