<abstract abstract-type="toc"> <title> <x xml:space="preserve">Abstract</x> </title> <p> <graphic position="anchor" id="ga" xlink:href="ark:/27927/pgh3qrh4d74" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" />In this study, we report the structural and electrical characteristics of high-<italic>κ</italic> Sm<sub>2</sub>O<sub>3</sub> and SmTiO<sub>3</sub> charge trapping layers on an indium–gallium–zinc oxide (IGZO) thin-film transistor (TFT) for non-volatile memory device applications.</p> </abstract>