Sub‐10 nm Features Obtained from Directed Self‐Assembly of Semicrystalline Polycarbosilane‐Based Block Copolymer Thin Films. (10th November 2014)
- Record Type:
- Journal Article
- Title:
- Sub‐10 nm Features Obtained from Directed Self‐Assembly of Semicrystalline Polycarbosilane‐Based Block Copolymer Thin Films. (10th November 2014)
- Main Title:
- Sub‐10 nm Features Obtained from Directed Self‐Assembly of Semicrystalline Polycarbosilane‐Based Block Copolymer Thin Films
- Authors:
- Aissou, Karim
Mumtaz, Muhammad
Fleury, Guillaume
Portale, Giuseppe
Navarro, Christophe
Cloutet, Eric
Brochon, Cyril
Ross, Caroline A.
Hadziioannou, Georges - Abstract:
- <abstract abstract-type="graphical" xml:lang="en" id="adma201404077-abs-0001"> <title> <x xml:space="preserve">Abstract</x> </title> <p> <bold>Highly‐ordered arrays</bold> with sub‐10 nm features are produced with topographical‐directed self‐assembly of low‐molecular‐weight poly(1, 1‐dimethyl silacyclobutane)‐<italic>block</italic>‐poly(methyl methacrylate). This system turns out to be of high interest for lithographic applications since the domain orientation is solely controlled through the polymer layer thickness, while the promotion of the microphase separation is obtained by a short thermal annealing process under mild conditions. <boxed-text content-type="graphic" position="anchor" orientation="portrait"><graphic position="anchor" mimetype="image" xlink:href="ark:/27927/pgh31px0xhb" orientation="portrait" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" /></boxed-text></p> </abstract>
- Is Part Of:
- Advanced materials. Volume 27:Number 2(2014)
- Journal:
- Advanced materials
- Issue:
- Volume 27:Number 2(2014)
- Issue Display:
- Volume 27, Issue 2 (2014)
- Year:
- 2014
- Volume:
- 27
- Issue:
- 2
- Issue Sort Value:
- 2014-0027-0002-0000
- Page Start:
- 261
- Page End:
- 265
- Publication Date:
- 2014-11-10
- Subjects:
- Materials -- Periodicals
Chemical vapor deposition -- Periodicals
620.11 - Journal URLs:
- http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)1521-4095 ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/adma.201404077 ↗
- Languages:
- English
- ISSNs:
- 0935-9648
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 0696.897800
British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store - Ingest File:
- 4297.xml