Size‐reduced two‐dimensional integrated magnetic sensor fabricated in 0.18‐μm CMOS process. Issue 3 (15th February 2015)

• Record Type: Journal Article
• Authors: Kimura, Takayuki; Uno, Kazuya; Masuzawa, Toru
• Is Part Of: IEEJ transactions on electrical and electronic engineering. Volume 10:Issue 3(2015)
• Page Start: 345
• Page End: 349
• Publication Date: 2015-02-15
• Subjects: Electrical engineering -- Periodicals; Electronics -- Periodicals; 621.3
• DOI: 10.1002/tee.22091
• Languages: English
• ISSNs: 1931-4973

Abstract

<abstract abstract-type="main" id="tee22091-abs-0001"> <title> <x xml:space="preserve">Abstract</x> </title> <p id="tee22091-para-0004">Two‐dimensional integrated magnetic sensors have been investigated in order to reduce their size for use in a magnetic self‐levitation motor. The two‐dimensional integrated magnetic sensor investigated in this paper is composed of a 16 × 16 array of Hall sensors and fabricated by a 0.18‐μm complementary metal–oxide–semiconductor (CMOS) standard process. The sizes of the Hall elements are 1 × 1, 2 × 2, 3 × 3, and 6 × 6 μm². Hall element of dimension 1 × 1 μm²was the minimum size in the fabrication process rule. The dimension of one pixel in which the Hall element was embedded was 20 × 20 μm². The average sensitivity of the arrayed Hall sensors at four sizes was about 0.140 mV/mT with a DC magnetic field. The product sensitivity at four sizes of Hall sensors was about 0.089 mV/(mA·mT), which is better than that of our previous work. Degradation of the product sensitivity was not seen in reduced‐size Hall elements. These results reveal that a Hall element of size 1 × 1 μm² has enough sensitivity for sensing the impeller position of a magnetically suspended motor. © 2015 Institute of Electrical Engineers of Japan. Published by John Wiley &amp; Sons, Inc.</p> </abstract>