Plasma Deposition of an Organophosphorus Coating at Atmospheric Pressure. Issue 6 (8th April 2013)

• Record Type: Journal Article
• Authors: Hilt, Florian; Duday, David; Gherardi, Nicolas; Frache, Gilles; Bardon, Julien; Choquet, Patrick
• Is Part Of: Plasma processes and polymers. Volume 10:Issue 6(2013:Jun.)
• Page Start: 556
• Page End: 563
• Publication Date: 2013-04-08
• Subjects: Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201300010
• Languages: English
• ISSNs: 1612-8850

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Plasma polymerisation of an organophosphorus monomer in atmospheric pressure‐dielectric barrier discharge was studied. Phosphate‐based molecules were introduced as a vapour into a nitrogen plasma at atmospheric pressure and a phosphorus‐containing coating was obtained. Scanning electron microscopy and ellipsometry revealed the morphology of the coating while Fourier transform infrared spectroscopy and X‐ray photoelectron spectroscopy indicated a hybrid organic–inorganic coating containing phosphate, organophosphate and different N‐containing groups. The new polymer structure of the coating was highlighted by secondary ion mass spectrometry.<boxed-text content-type="graphic" position="anchor" orientation="portrait"><graphic position="anchor" mimetype="image" xlink:href="ark:/27927/pgh191tt4cz" orientation="portrait" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" /></boxed-text></p> </abstract>