46.2: Invited Paper: Micron‐Patterned Deposition through Shadow masks with high precision alignment for OLED and e‐Paper applications. Issue 1 (1st July 2013) - Ambrose, T.
Abstract Conventional shadow‐mask alignment using mechanical pins or machine‐vision techniques achieve 5 micron alignment accuracy. Here we introduce a novel alignment system‐architecture based on coded apertures along with discrete photo detectors as the sensing elements. It allows submicron accuracy and repeatability making it highly suitable for display manufacturing applications.