33.4L: Late‐News Paper: High Resolution Vacuum Patterning of Organic‐ and Metal‐Layers for Organic Electronic Devices. Issue 1 (1st July 2013)

• Record Type: Journal Article
• Authors: Burghart, Markus; Dutkowiak, Andreas; Tandler, Lutz; Richter, Jörk; Haasemann, Georg; Gross, Harald; Seyfert, Ulf; Strietzel, Thomas; Hecht, Christian
• Is Part Of: Digest of technical papers. Volume 44:Issue 1(2013)
• Page Start: 427
• Page End: 430
• Publication Date: 2013-07-01
• Subjects: Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/j.2168-0159.2013.tb06238.x
• Languages: English
• ISSNs: 0097-966X

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>In this paper, we describe the recent progress made in the development of the Flash Mask Transfer Lithography for AMOLED‐pixel patterning. Basic principles of the technology are discussed, recent results on resolution and processing are presented and patterns and materials were analyzed. Based on the technology a lab scale cluster‐tool was manufactured to demonstrate the feasibility of pixel patterning in OLED displays.</p> </abstract>