29.2: Atomic Layer Deposition of Al2O3/ZrO2 Nanolaminate on the Plastic Substrates for the Flexible Display. Issue 1 (1st July 2013)
- Record Type:
- Journal Article
- Title:
- 29.2: Atomic Layer Deposition of Al2O3/ZrO2 Nanolaminate on the Plastic Substrates for the Flexible Display. Issue 1 (1st July 2013)
- Main Title:
- 29.2: Atomic Layer Deposition of Al2O3/ZrO2 Nanolaminate on the Plastic Substrates for the Flexible Display
- Authors:
- Lee, Jong Geol
Kim, Hyun Gi
Kim, Sung Soo - Abstract:
- <abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Al<sub>2</sub>O<sub>3</sub>/ZrO<sub>2</sub> nanolaminate was formed on plastic substrates by low frequency plasma‐enhanced atomic layer deposition (PEALD) process for enhancement of barrier properties. A remarkable barrier performance was observed in the optimized nanolaminate structure, which was attributed to cover the drawback of each layer between the Al<sub>2</sub>O<sub>3</sub>/ZrO<sub>2</sub> nanolaminate.</p> </abstract>
- Is Part Of:
- Digest of technical papers. Volume 44:Issue 1(2013)
- Journal:
- Digest of technical papers
- Issue:
- Volume 44:Issue 1(2013)
- Issue Display:
- Volume 44, Issue 1 (2013)
- Year:
- 2013
- Volume:
- 44
- Issue:
- 1
- Issue Sort Value:
- 2013-0044-0001-0000
- Page Start:
- 358
- Page End:
- 360
- Publication Date:
- 2013-07-01
- Subjects:
- Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/j.2168-0159.2013.tb06220.x ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 3620.xml