16.1: Negative‐Bias Photodegradation Mechanism in InGaZnO TFT. Issue 1 (1st July 2013)

• Record Type: Journal Article
• Authors: Tsubuku, Masashi; Watanabe, Ryosuke; Ishihara, Noritaka; Kishida, Hideyuki; Takahashi, Masahiro; Yamazaki, Shunpei; Kanzaki, Yohsuke; Matsukizono, Hiroshi; Mori, Shigeyasu; Matsuo, Takuya
• Is Part Of: Digest of technical papers. Volume 44:Issue 1(2013)
• Page Start: 166
• Page End: 169
• Publication Date: 2013-07-01
• Subjects: Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/j.2168-0159.2013.tb06169.x
• Languages: English
• ISSNs: 0097-966X

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Recent studies have shown that IGZO are variously influenced by photoirradiation. In this study, by using measurement results of optical properties and calculation results, a relationship of defect levels in the IGZO films and the SiO₂ films to negative‐bias photodegradation was examined, and the mechanism of the degradation was revealed.</p> </abstract>