Cite
HARVARD Citation
La Magna, A. et al. (n.d.). Atomic scale Monte Carlo simulations of BF3 plasma immersion ion implantation in Si. Physica status solidi. 11 (1), pp. 109-112. [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
La Magna, A. et al. (n.d.). Atomic scale Monte Carlo simulations of BF3 plasma immersion ion implantation in Si. Physica status solidi. 11 (1), pp. 109-112. [Online].