AlGaN based MEMS structures. Issue 2 (20th January 2014)

• Record Type: Journal Article
• Authors: Hähnlein, Bernd; Tonisch, Katja; Ecke, Gernot; Grieseler, Rolf; Michael, Steffen; Schaaf, Peter; Pezoldt, Jörg
• Is Part Of: Physica status solidi. Volume 11:Issue 2(2014:Feb.)
• Page Start: 239
• Page End: 243
• Publication Date: 2014-01-20
• Subjects: Solid state physics -- Congresses; Solid state physics -- Periodicals; Solid state physics; Conference proceedings; Periodicals; 530.41
• DOI: 10.1002/pssc.201300153
• Languages: English
• ISSNs: 1862-6351

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Al_xGa_1‐xN solid solutions were heteroepitaxially grown on 3C‐SiC(111)/Si(111) pseudo substrates fabricated by low pressure chemical vapour deposition. Free standing doubly‐clamped resonator bars and cantilevers were fabricated from these Al_xGa_1–xN layers. The resonance frequencies of the microelectromechanical structures were measured using electrostatic excitation and vibrometry at ambient conditions. The obtained resonance frequencies allowed a self consistent determination of the Young's modulus of the Al_xGa_1‐xN layers and the residual strain in the free standing structures. (© 2014 WILEY‐VCH Verlag GmbH &amp; Co. KGaA, Weinheim)</p> </abstract>