Cite
HARVARD Citation
Botzakaki, M. et al. (n.d.). Electrical characteristics of ALD‐deposited Al2O3 thin films on p‐type germanium substrates. Physica status solidi. 10 (1), pp. 137-140. [Online].
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Botzakaki, M. et al. (n.d.). Electrical characteristics of ALD‐deposited Al2O3 thin films on p‐type germanium substrates. Physica status solidi. 10 (1), pp. 137-140. [Online].