Chemical State Information of Bulk Specimens Obtained by SEM-Based Soft-X-Ray Emission Spectrometry. (14th March 2014)

• Record Type: Journal Article
• Authors: Terauchi, Masami; Koshiya, Shogo; Satoh, Futami; Takahashi, Hideyuki; Handa, Nobuo; Murano, Takanori; Koike, Masato; Imazono, Takashi; Koeda, Masaru; Nagano, Tetsuya; Sasai, Hiroyuki; Oue, Yuki; Yonezawa, Zeno; Kuramoto, Satoshi
• Is Part Of: Microscopy and microanalysis. Volume 20:Number 3(2014:Jun.)
• Page Start: 692
• Page End: 697
• Publication Date: 2014-03-14
• Subjects: Microscopy -- Periodicals; Microchemistry -- Periodicals; 502.82
• DOI: 10.1017/S1431927614000439
• Languages: English
• ISSNs: 1431-9276

Abstract

<abstract abstract-type="normal"> <title>Abstract</title> <p>Electron-beam-induced soft-X-ray emission spectroscopy (SXES) that uses a grating spectrometer has been introduced to a conventional scanning electron microscope (SEM) for characterizing desired specimen areas of bulk materials. The spectrometer was designed as a grazing incidence flat-field optics by using aberration corrected (varied line spacing) gratings and a multichannel plate detector combined with a charge-coupled device camera, which has already been applied to a transmission electron microscope. The best resolution was confirmed as 0.13 eV at Mg L-emission (50 eV), which is comparable with that of recent dedicated electron energy-loss spectroscopy instruments. This SXES-SEM instrument presents density of states of simple metals of bulk Mg and Li. Apparent band-structure effects have been observed in Si L-emission of Si wafer, P L-emission of GaP wafer, and Al L-emissions of intermetallic compounds of AlCo, AlPd, Al₂Pt, and Al₂Au.</p> </abstract>