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HARVARD Citation
Ben Amar, A. et al. (n.d.). Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application. Physica status solidi. 211 (7), pp. 1655-1659. [Online].
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Ben Amar, A. et al. (n.d.). Young's modulus extraction of epitaxial heterostructure AlGaN/GaN for MEMS application. Physica status solidi. 211 (7), pp. 1655-1659. [Online].