Ultra‐thin 3D Nano‐Devices from Atomic Layer Deposition on Polyimide. (1st April 2014)

• Record Type: Journal Article
• Authors: Eigenfeld, Nathan T.; Gray, Jason M.; Brown, Joseph J.; Skidmore, George D.; George, Steven M.; Bright, Victor M.
• Is Part Of: Advanced materials. Volume 26:Number 23(2014)
• Page Start: 3962
• Page End: 3967
• Publication Date: 2014-04-01
• Subjects: Materials -- Periodicals; Chemical vapor deposition -- Periodicals; 620.11
• DOI: 10.1002/adma.201400410
• Languages: English
• ISSNs: 0935-9648

Abstract

<abstract abstract-type="graphical" xml:lang="en" id="adma201400410-abs-0001"> <title> <x xml:space="preserve">Abstract</x> </title> <p> <bold>A new nanofabrication process for nano/micro‐devices</bold> through the combination of inorganic nanomaterials from atomic layer deposition (ALD) on 3‐dimensional organic polyimide substrates is developed. The first suspended ALD structures with multiple patterned suspended levels on the order of 10 nm are fabricated and results surrounding the mechanical stability of ultra‐thin suspended structures are discussed. <boxed-text content-type="graphic" position="anchor" orientation="portrait"><graphic position="anchor" mimetype="image" xlink:href="ark:/27927/pghmfn3qd0" orientation="portrait" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" /></boxed-text></p> </abstract>