Patternable Large‐Scale Molybdenium Disulfide Atomic Layers Grown by Gold‐Assisted Chemical Vapor Deposition1. Issue 5 (13th January 2014)

• Record Type: Journal Article
• Authors: Song, Intek; Park, Chibeom; Hong, Misun; Baik, Jaeyoon; Shin, Hyun‐Joon; Choi, Hee Cheul
• Is Part Of: Angewandte Chemie international edition. Volume 53:Issue 5(2014)
• Page Start: 1266
• Page End: 1269
• Publication Date: 2014-01-13
• Subjects: Chemistry -- Periodicals; 540
• DOI: 10.1002/anie.201309474
• Languages: English
• ISSNs: 1433-7851

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>A novel way to grow MoS₂ on a large scale with uniformity and in desired patterns is developed. We use Au film as a catalyst on which [Mo(CO)₆] vapor decomposes to form a Mo‐Au surface alloy that is an ideal Mo reservoir for the growth of atomic layers of MoS₂. Upon exposure to H₂S, this surface alloy transforms into a few layers of MoS₂, which can be isolated and transferred on an arbitrary substrate. By simply patterning Au catalyst film by conventional lithographic techniques, MoS₂ atomic layers in desired patterns can be fabricated.</p> </abstract>