Large Arrays and Properties of 3‐Terminal Graphene Nanoelectromechanical Switches. (12th December 2013) - Liu, Xinghui
Abstract Large arrays of 3‐terminal nanoelectromechanical graphene switches are fabricated. The switch is designed with a novel geometry that leads to low actuation voltages and improved mechanical integrity, while reducing adhesion forces, which improves the reliability of the switch. A finite element model including non‐linear electromechanics is used to simulate the switching behavior and to deduce a scaling relation between the switching voltage and device dimensions.