Characterization, optimization and surface physics aspects of in situ plasma mirror cleaning. (24th January 2014)

• Record Type: Journal Article
• Authors: Pellegrin, Eric; Šics, Igors; Reyes‐Herrera, Juan; Perez Sempere, Carlos; Lopez Alcolea, Juan Josep; Langlois, Michel; Fernandez Rodriguez, Jose; Carlino, Vincent
• Is Part Of: Journal of synchrotron radiation. Volume 21:Part 2(2014)
• Page Start: 300
• Page End: 314
• Publication Date: 2014-01-24
• Subjects: Synchrotron radiation -- Periodicals; Free electron lasers -- Periodicals; 539.73505
• DOI: 10.1107/S1600577513032402
• Languages: English
• ISSNs: 0909-0495

Abstract

<abstract abstract-type="main" xml:lang="en"> <title> <x xml:space="preserve">Abstract</x> </title> <p>Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still under development. In this study an analysis of remediation strategies all based on <italic>in situ</italic> low‐pressure RF plasma cleaning approaches is reported, including a quantitative determination of the optimum process parameters and their influence on the chemistry as well as the morphology of optical test surfaces. It appears that optimum results are obtained for a specific pressure range as well as for specific combinations of the plasma feedstock gases, the latter depending on the chemical aspects of the optical surfaces to be cleaned.</p> </abstract>