Multi‐sensor chip for the investigation of different types of metal oxides for the detection of H2O2 in the ppm range. Issue 5 (27th February 2013)

• Record Type: Journal Article
• Authors: Reisert, Steffen; Schneider, Benno; Geissler, Hanno; van Gompel, Matthias; Wagner, Patrick; Schöning, Michael J.
• Is Part Of: Physica status solidi. Volume 210:Issue 5(2013:May)
• Page Start: 898
• Page End: 904
• Publication Date: 2013-02-27
• Subjects: Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201200930
• Languages: English
• ISSNs: 1862-6300

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <sec id="pssa201200930-sec-0001" sec-type="section"> <p>In this work, a multi‐sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multi‐sensor chip are described. Pure SnO₂ and WO₃ as well as Pd‐ and Pt‐doped SnO₂ films are characterized in terms of their sensitivity to H₂O₂. The sensing films have been prepared by drop‐coating of water‐dispensed nano‐powders. A physical characterization, including scanning electron microscopy and X‐ray diffraction analysis of the deposited metal‐oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H₂O₂ in the ppm range. The highest sensitivity and reproducibility was achieved using Pt‐doped SnO₂. <inline-graphic xlink:href="ark:/27927/pgg20q121rf" content-type="pssa201200930-gra-0001" xlink:type="simple" xmlns:xlink="http://www.w3.org/1999/xlink" /></p> <p>Calibration plot of a SnO₂, WO₃, Pt‐, and Pd‐doped SnO₂ gas sensor for H₂O₂ concentrations in the ppm range.</p> </sec> </abstract>