A Novel Manganese(II) MOCVD Precursor: Synthesis, Characterization, and Mass Transport Properties of Mn(hfa)2tmeda1. Issue 1 (18th February 2013)

• Record Type: Journal Article
• Authors: Lipani, Zaira; Catalano, Maria R.; Rossi, Patrizia; Paoli, Paola; Malandrino, Graziella
• Is Part Of: Chemical vapor deposition. Volume 19:Issue 1/3(2013:Mar.)
• Page Start: 22
• Page End: 28
• Publication Date: 2013-02-18
• Subjects: Chemical vapor deposition -- Periodicals; 671.735
• DOI: 10.1002/cvde.201207017
• Languages: English
• ISSNs: 0948-1907

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>The complex, Mn(hfa)₂tmeda [(H‐hfa = 1, 1, 1, 5, 5, 5‐hexafluoro‐2, 4‐pentandione, tmeda = N, N, N′, N′‐tetramethylethylendiamine)], is synthesized in a single‐step reaction and characterized by elemental analysis, thermal analysis, and infrared (IR) spectroscopy. The solid‐state crystal structure of Mn(hfa)₂tmeda provides evidence of a mononuclear structure. The thermal analyses show that the complex is thermally stable and can be evaporated to leave less than 2% residue. The complex properties are compared with the first generation, commercially available Mn^II and Mn^III precursors, Mn(acac)₂ (Hacac = acetylacetone) and Mn(tmhd)₃ (Htmhd = 2, 2, 6, 6‐tetramethyl‐3, 5‐heptanedione), respectively. Mn(hfa)₂tmeda represents the first example of manganese(II) precursor that can be used in the liquid phase without decomposition, thus providing constant evaporation rates, even for long deposition times. It is successfully applied to the reduced‐pressure, metal‐organic (MO)CVD of the Mn₃O₄ phase.</p> </abstract>