AlxTayOz Mixture Coatings Prepared Using Atomic Layer Deposition for Corrosion Protection of Steel1. Issue 4 (22nd May 2013)

• Record Type: Journal Article
• Authors: Härkönen, Emma; Díaz, Belén; Światowska, Jolanta; Maurice, Vincent; Seyeux, Antoine; Fenker, Martin; Tóth, Lajos; Radnóczi, György; Marcus, Philippe; Ritala, Mikko; Knez, Mato; Yong, Qin
• Is Part Of: Chemical vapor deposition. Volume 19:Issue 4/6(2013:Jun.)
• Page Start: 194
• Page End: 203
• Publication Date: 2013-05-22
• Subjects: Chemical vapor deposition -- Periodicals; 671.735
• DOI: 10.1002/cvde.201207028
• Languages: English
• ISSNs: 0948-1907

Abstract

<abstract abstract-type="main" xml:lang="en"> <title>Abstract</title> <p>Atomic layer deposited (ALD) 50 nm Al_{<italic>x</italic>}Ta_{<italic>y</italic>}O_{<italic>z</italic>} mixture coatings are grown on steel for corrosion protection. In morphological and compositional analyses the coatings are found to be uniform, conformal, well‐adhered, and low in defect density. Corrosion protection properties are evaluated with polarization measurements and neutral salt spray (NSS) testing. The sealing properties of the mixtures improve with increasing aluminum oxide content, whereas the protection durability improves with increasing tantalum oxide content. In comparison to single‐layer and nano‐laminate ALD Al₂O₃ and Ta₂O₅ coatings, all mixtures are found to have better protective properties.</p> </abstract>